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04. Publication
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Publication
International
Domestic
Patents
¤ýYear
¡¤ 2024
¤ýTitle of paper
¡¤ Silicon dioxide (SiO2) solid blocking layer on through-glass via surface for efficient highly selective copper filling
¤ýAuthor
¡¤ Fan Yang; Qing Wang; Jinhyun Lee; Yunha Song; Inseong Hwang; Sanghwa Yoon; Bongyoung Yoo
¤ýPublication in journal
¡¤ Surfaces and Interfaces
¤ýStatus of publication
¡¤