Electrochemical Nano-Materials and System Lab.

04. Publication

 
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Publication

 
¤ýYear ¡¤ 2024
¤ýTitle of paper ¡¤ Silicon dioxide (SiO2) solid blocking layer on through-glass via surface for efficient highly selective copper filling
¤ýAuthor ¡¤ Fan Yang; Qing Wang; Jinhyun Lee; Yunha Song; Inseong Hwang; Sanghwa Yoon; Bongyoung Yoo
¤ýPublication in journal ¡¤ Surfaces and Interfaces
¤ýStatus of publication ¡¤